??10????CVD??AKT-90K PECVD??

????????????8.5???AKT-55K PECVD?????????????????????1????????????????????????????????????????????????

?10????CVD??AKT-90K PECVD???5??????process chamber????????load lock chamber???????????????Transfer Chamber??????????14m×14m?
????8.5?????????????????1.6????????????1.3????????????1.2???4.2m????????8.5??????2????228??

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