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来源：????

???????????????????????????????????2012?9??????????????????????????????????

???????????PET?????

???“?73????????????”?2012?9?11?14???????????120m??????????230mm?????????????????????????10cm/??????????????????????????????????“??????????400m???????????????”??????????????????????

???????????

????????????CVD?????????????????CVD????????????????????

???CVD??????????????????????1000?????????????????????????????????????????????????????????????????

?????????????????????????1?????????1000?????????????????Cu?????????????????“?????????????”???????????????????????“????????”?????

?1????????????

??????????1000??CVD???????????????????????????????????????1000Pa?1?????1/100????????????????????????

????????????????????????????????????????????1000Pa??1/100????“?????????????????????????????????????”?????

??????????980??????“?????1080????????????”

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